Spectropur Pressure regulator E71-VCR
Product Features
- Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0
- Single-stage regulator with anti vibration device
- Pressure regulator can be evacuated
- High control accuracy
- Metal-to-metal seal to atmosphere
- High surface quality
- Minimized internal volume for short purge times
- Electro-polished surfaces (gas wetted)
- Simple outlet pressure limitation by handwheel
- 100 % helium-leak-tested
- Assembly in clean room class ISO 5.0
Technical Data
Inlet pressure P₁
max. 200 bar
Outlet pressure P₂
max. 1.5 / 4 / 10 bar
Materials
Body: SS 1.4404
Diaphragm: Hastelloy C276
Other gas-wetted parts: SS 1.4404
Sealings: PTFE / PCTFE / PVDF
Diaphragm: Hastelloy C276
Other gas-wetted parts: SS 1.4404
Sealings: PTFE / PCTFE / PVDF
Surface roughness
Rₐ,max ≤ 0,25 µm
Rₐ,Avg ≤ 0,18 µm
Rₐ,Avg ≤ 0,18 µm
Temperature range
Temperature: -20°C to +60°C
Leak rate
to atmosphere: ≤ 10⁻⁹ mbar l/s He
via seat: ≤ 10⁻⁶ mbar l/s He
via seat: ≤ 10⁻⁶ mbar l/s He
Cᵥ-value
0,7
In- / Outlet
1/2" VCR male or
1/2" VCR female
1/2" VCR female
Weight
1,5 kg
Downloads
Data Sheets
User Manuals
HTML
spectropur
