Spectropur Point of use EE55-1-VCR
Product Features
- Point of use for corrosive gases and gas mixtures with corrosive components from grade 6.0
- Laboratory-style design for easy installation
- High control accuracy
- Pressure regulator with tied diaphragm
- Orbital welded VCR-connections
- Point of use can be evacuated
- Manual process gas valve (TPI)
- 100 % Helium leak tested
- Assembly in clean room class ISO 5.0
Technical Data
Inlet pressure P₁
max. 725 psi
Outlet pressure P₂
22 / 60 / 145 psi
Materials
Body: Stainless steel 1.4404
Diaphragms: Hastelloy C276
Other gas wetted parts: Stainless steel 1.4404
Sealings: PCTFE, PCTFE, PVDF
Diaphragms: Hastelloy C276
Other gas wetted parts: Stainless steel 1.4404
Sealings: PCTFE, PCTFE, PVDF
Surface roughness (gas wetted areas)
Rₐ,max ≤ 0,25 µm
Leak rate
(to atmosphere): 1 x 10⁻⁹ mbar l/s He
(via seat): 1 x 10⁻⁶ mbar l/s He
(via seat): 1 x 10⁻⁶ mbar l/s He
Cᵥ-value
0.24 (kv = 0.2)
Temperature range
-4°F to +140°F
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