Spectropur Pressure regulator E51-VCR
Product Features
- Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0
- single-stage version
- Pressure regulator can be evacuated or special version for vacuum pressure control (see data sheet E51V-VCR)
- High control accuracy
- Metal-to-metal seal to atmosphere
- High surface quality
- Tied diaphragm
- Minimized internal volume for short purge times
- Electro-polished surfaces (gas wetted)
- Simple outlet pressure limitation by handwheel
- 100 % Helium leak tested
- Assembly in cleanroom class ISO 5.0
Technical Data
Operating pressure
max. 300 bar
Materials
Body: SS 1.4404 (SS 316L)
Diaphragm: Hastelloy C276
Other gas wetted parts: SS 1.4404 (SS 316L)
Sealings: PCTFE, PVDF, PTFE
Diaphragm: Hastelloy C276
Other gas wetted parts: SS 1.4404 (SS 316L)
Sealings: PCTFE, PVDF, PTFE
Surface roughness
Rₐ,max ≤ 0,25 µm
Rₐ,Avg ≤ 0,18 µm
Rₐ,Avg ≤ 0,18 µm
Leak rate
(to atmosphere) 1 x 10⁻⁹ mbar l/s He
(via seat) 1 x 10⁻⁶ mbar l/s He
(via seat) 1 x 10⁻⁶ mbar l/s He
Temperature range
-20°C to +60°C
Cᵥ-value
0,24
Weight
1,2 kg
In- / outlet
1/4"-VCR male or
1/4"-VCR female
1/4"-VCR female
Downloads
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