Spectropur Diaphragm valves MV3-VCR
Product Features
- Stainless steel valves for manual or automatic (pneumatic) shut-off
- Diaphragm metal-to-metal sealed to atmosphere
- Fully functional even when valve is evacuated
- Minimized internal volume for short purge times
- No parts in the gas-wetted area exposed to friction or torsional stress provide minimum particle generation
- Embedded soft seat seal made of PCTFE or PVDF permits frequent operation without loss of tightness
- Modular design for easy replacement of internal parts
- Clearly legible position indication (on/off)
- 100 % Helium-leak-tested
- Assembly in cleanroom class ISO 5.0
- Modular design
- Pneumatic actuator optional for line pressure 25, 100, 200 and 300 bar
- Optional with inductive proximity switch
Technical Data
Materials
Body: stainless steel 1.4404
Diaphragms: Hastelloy C276
Other gas wetted parts: stainless steel 1.4404
Valve seat: PCTFE or PVDF
Diaphragms: Hastelloy C276
Other gas wetted parts: stainless steel 1.4404
Valve seat: PCTFE or PVDF
Surface roughness
Rₐ, max. ≤ 0,25 µm
(gas-wetted areas) Rₐ, Avg. ≤ 0,13 µm
(gas-wetted areas) Rₐ, Avg. ≤ 0,13 µm
Leak rate
(to atmosphere) 1 x 10⁻⁹ mbar l/s He
(via seat) 1 x 10⁻⁶ mbar l/s He
(via seat) 1 x 10⁻⁶ mbar l/s He
Operating pressure
max. 300 bar
O2: max. 200 bar
O2: max. 200 bar
Cᵥ-value
0,33
Nominal size
DN 4
Temperature range
-20°C to +60°C
In- / Outlet
1/4" VCR-male
1/4" VCR-female
tube stub 1/4"x28mm
1/4" VCR-female
tube stub 1/4"x28mm
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