Spectropur Point of use stick EES55-1-VCR
Product Features
- Point of use stick for corrosive gases and gas mixtures with corrosive components from grade 6.0
• High control accuracy
• Pressure regulator with tied diaphragm
• Orbital welded VCR-connections
• Point of use can be evacuated
• Manual or pneumatic valve options:
- process gas inlet (TPI)
- purge gas inlet (SPI)
- purge gas vent (SPV)
- process gas outlet (TPO) - 100 % Helium leak tested
- Assembly in clean room class ISO 5.0
Technical Data
Inlet pressure P₁
max. 50 bar
Outlet pressure P₂
max. 1,5 / 4 / 10 bar
Materials
Body: Stainless steel 1.4404
Diaphragms: Hastelloy C276
Other gas wetted parts: Stainless steel 1.4404
Sealings: PCTFE, PCTFE, PVDF
Diaphragms: Hastelloy C276
Other gas wetted parts: Stainless steel 1.4404
Sealings: PCTFE, PCTFE, PVDF
Surface roughness (gas wetted areas)
Ra,max ≤ 0,25 µm
Leak rate
(to atmosphere): 1 x 10⁻⁹ mbar l/s He
(via seat): 1 x 10⁻⁶ mbar l/s He
(via seat): 1 x 10⁻⁶ mbar l/s He
Cᵥ-value
0,24 (kv = 0,2)
Temperature range
-20°C to +60°C
Weight
2,4 ... 5,0 kg
Downloads
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