Spectropur Gas safety cylinder cabinet
Product Features
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Spectropur gas safety cylinder cabinet with integrated controller for fully automatic change-over and purging
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System for ultra high purity gases in the semiconductor industry
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Controller for safe and continuous gas supply + purging before and after a gas cylinder exchange
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Process safety as well as safety for the operating personnel and the environment
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Constant and reliable gas supply to ensure uninterrupted production
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Patented purging devices to secure the required gas purity
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Permanent status monitoring of pressure and operation mode
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Implementation of BMS alarms
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Safe remote access
Technical Data
Operating pressure
max. 300 bar
Downloads
Data Sheets
User Manuals
spectropur
