Spectropur Gas safety cylinder cabinet

Product Features

  • Spectropur gas safety cylinder cabinet with integrated controller for fully automatic change-over and purging

  • System for ultra high purity gases in the semiconductor industry

  • Controller for safe and continuous gas supply + purging before and after a gas cylinder exchange

  • Process safety as well as safety for the operating personnel and the environment

  • Constant and reliable gas supply to ensure uninterrupted production

  • Patented purging devices to secure the required gas purity 

  • Permanent status monitoring of pressure and operation mode

  • Implementation of BMS alarms

  • Safe remote access

Gas supply equipment for high-purity gases from grade 6.0

spectropur
Semi cabinet
Spectropur Gas safety cylinder cabinet

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