Spectropur Pressure regulator E81-VCR
Product Features
- Pressure regulator for hazardous gases and ultra high purity gases from grade 6.0
- Single-stage regulator
- Pressure regulator can be evacuated
- High control accuracy
- Metal-to-metal seal to atmosphere
- High surface quality
- Tied diaphragm
- Minimized internal volume for short purge times
- Electro-polished surfaces (gas wetted)
- Simple outlet pressure limitation by handwheel
- 100 % Helium leak tested
- Assembly in clean room class ISO 5.0
Technical Data
Inlet pressure P₁
max. 580 psi
Outlet pressure P₂
max. 22 / 60 / 145 psi
Materials
Body: SS 1.4404
Diaphragm: Hastelloy C276
Other gaswetted parts: SS 1.4404
Sealings: PTFE
Diaphragm: Hastelloy C276
Other gaswetted parts: SS 1.4404
Sealings: PTFE
Surface roughness
Rₐ,max ≤ 0,25 µm
Rₐ,Avg ≤ 0,18 µm
Rₐ,Avg ≤ 0,18 µm
Temperature range
-4°F to +140°F
Leak rate
to atmosphere: ≤ 10⁻⁹ mbar l/s He
via seat: ≤ 10⁻⁶ mbar l/s He
via seat: ≤ 10⁻⁶ mbar l/s He
Cᵥ-value
1.0
In-/Outlet
1/2"-VCR male or
1/2"-VCR female
1/2"-VCR female
Weight
3.7 lb
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