Troubleshooting and fault rectification

Fault

Possible cause

Remedy

Outlet pressure too low

Process gas source empty

Check inlet pressure on the pressure regulator and change the process gas source if necessary

Vibration noises in the pressure regulator

Pressure regulator faulty

Replace pressure regulator

System pressure cannot be set to the desired value

Pressure regulator faulty

Replace pressure regulator

System pressure outside the intended system pressure

Only operate the system at the intended range

Flow insufficient or fluctuating

Inlet pressure of the process gas too low

Increase inlet pressure

Valve faulty

Replace faulty valve

Load filter

Change filter

Pressure relief valve, over-pressure valve or safety valve are discharging gas

Impermissible pressure rise in the outlet pressure range

Close all valves and check pressure control panel

Leak

Connection leaking

Flush pressure control panel clear and perform pressure test and leak test