Flushing in the process gas to the process

Flushing in the entire line network to the consumer must be implemented via a waste gas valve on the process. To do this, refer to the system documentation for the consumer. This procedure does not apply to fluorine or fluorine mixtures.

  1. Close all valves.
  2. Open slowly the process gas source valve and then the HPI and PLI valves, to fill the entire area in which the process gas is to penetrate up to the process and fill it (pressure build-up). In this process, the process source pressure and the gas type properties are to be taken into account.
  3. Open shut-off valve on the process. Ensure that the process gas can be discharged safely via the process.

The pressure control panel is now in a condition ready for operation.

Once it is put into operation, both sides of the panel must always be connected. Before replacing a cylinder, always turn the switching lever with the "In operation" display to the side from which gas is currently being drawn. The arrow indicating the "reserve side" points to the side of the pressure control panel on which the gas cylinders are now to be replaced.
It is extremely important to move the switching lever, since otherwise once the empty gas cylinders have been replaced with full gas cylinders and the process gas valve has been opened, this side would take over the gas supply function again. The reserve side would then remain the reserve side, but its gas reservoir would not be 100% full.