Flushing in the process gas to the consumer

Flushing in the entire line network to the consumer must be implemented via a waste gas valve on the process. To do this, refer to the system documentation for the consumer. This procedure does not apply to fluorine or fluorine mixtures.

1. Close all valves.
2. Open slowly the process gas source valve and then the HPI and PLI valves, to fill the entire area in which the process gas is to penetrate up to the process and fill it (pressure build-up). The process source pressure and the gas type properties are to be taken into account here.
3. Open the shut-off valve on the consumer. Ensure that the process gas can be discharged safely via the process.

The High pressure panel is now in a condition ready for operation.

Once it is put into operation, both sides of the 2-sided panel must always be connected. Only the HPI valve on the side that is to go into operation is opened. The HPI valve on the reserve side remains closed.