Exchanging the process gas source

WARNING

warning

Gas source exchange

If a gas source exchange is performed incorrectly, gas leakage and poisoning of persons may occur.

  1. The gas source exchange are to be carried out by trained specialist personnel and never unattended.
  2. A pressure test must be conducted after each gas source exchange.
  3. For each gas source exchange, a new seal suitable for the used gas is to be used.
  4. Wear the personal protective equipment prescribed in the risk assessment.

With each gas source exchange, check the port for leak-tightness. We strongly recommend replacing the gasket every time the gas source is exchanged. Always turn the shut-off valves slowly and as far as the stop when opening or closing them!

 

Removing the empty process gas source:

  1. Close the process gas source valve.
  2. Close valve HPI.
  3. Open valve HPV to reduce the pressure.
  4. Close valve HPV.
  5. Disconnect the process gas source connection.
  6. Mount the sealing nut on the gas source valve and protective cap on the process gas source.
  7. Identify, secure and remove the empty process gas source.

 

Connecting the new process gas source:

  1. Provide new process gas source, position in front of the bracket and secure using the safety chain.
  2. Remove and retain the protective cap and screw plug.
  3. Check the port thread and sealing; a new sealing must be used each time the gas source is exchanged.
  4. Screw the process gas connection onto the gas source valve by hand and tighten it gastight with a spanner.
  5. Open the process gas source valve, build up pressure, and close it again. Check using leak test spray whether the process gas port is leak-tight.
  6. Open valve HPV to reduce the pressure.
  7. Close valve HPV.
  8. Open the process gas source valve to build up the pressure with purge gas (process gas).
  9. Wait until the pressure has been built up and close the process gas source valve again.
  10. Open valve HPV to build up the pressure and then close it again.
    Repeat steps 8 to 10 depending on the gas type at least 10 times.
  11. Open the gas source valve to fill the gas connection with process gas.
  12. Close the process gas source valve.
  13. Open valve HPI. In the case of a two-sided High pressure panel with manual switchover, keep the HPI valve closed, and do not open it until the supply side has to be changed again.
  14. Slowly open the gas source valve.

 

The High pressure panel is ready for supply.