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Spectropur - Gas supply equipment for high purity gases from grade 6.0

Spectropur Pressure regulator E71-VCR

Produktabbildung
LM51-6 Technische Zeichnung

Product features

  • Design optimized for low flow restriction and thorough electropolishing of the internal surfaces
  • Minimized internal volume for short purge times
  • All gas-wetted parts made of stainless steel SS 316L, Hastelloy C276 and PCTFE or PVDF respectively
  • Single-stage regulator
  • Regulator can be evacuated
  • Internal connectors for pressure gauges
  • High control accuracy
  • Metal-to-metal seal to atmosphere
  • High surface quality
  • Connectors: In-/Outlet UNF 7/8-14 (1/2 VCR-compatible); pressure indicator ports UNF 9/16-18 (1/4 VCR-compatible)
  • Simple outlet pressure limitation by handwheel
  • 100 % helium-leak-tested
  • Assembly in cleanroom class ISO 5.0
  • Optional documentation acc. to SEMASPEC
Technical data
Materials
Body:

Diaphragm:
Gas-wetted parts:

Valve seat:

SS 1.4404 ESU/VAR
(SS 316L remelted)
Hastelloy C276
SS 1.4404 ESU/VAR
(SS 316L remelted)
PCTFE or PVDF

Surface roughness
upon request:
Ra 0,25 m
Ra 0,18 m
Leak rate
to atmosphere:
via valve seat:

< 1 x 10-9 mbar l/s He
< 1 x 10-6 mbar l/s He
Temperature /
Pressure ranges

Temperature:
Inlet pressure:
Outlet pressure:


-30C to +60C
max. 200 bar
max. 1,5 / 4 / 10 bar
Cv-value 0,7
Weight 1,5 kg
In- / Outlet
1/2" VCR-Female
1/2" VCR-Male
other connectors upon request